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PROCESSES

Optical Photolithography

  • Photoresists
  • Polyimide
  • Wafer cleaving with surface protection
  • Lift-off processing
  • Edge bead Removal mask Processing
  • Chrome mask making
  • Microfluidics
  • Optofluidics

Wet Processing

  • Chemical handling
  • Wet benches

Wet Oxide etch

  • Silicon
  • Ga As
  • In P
  • Quartz
  • Glass

Oxygen Plasma

  • Contaminant removal
  • Clean surfaces

Annealing and doping

  • Zinc diffusion
  • Annealing is available for Silicon
  • Annealing for toxic material must be done under enclosed system

E-Beam Photoresist

  • PMMA
  • SU-8

Maskmaking

  • Contact mask design

Soft Lithography

  • Microfluidic
  • Optofluidic

 

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