PROCESSES

Optical Photolithography

• Photoresists
• Polyimide
• Wafer cleaving with surface protection
• Lift-off processing
• Edge bead Removal mask Processing
• Chrome mask making
• Microfluidics
• Optofluidics

Wet Processing

• Chemical handling
• Wet benches

Wet Oxide etch

• Silicon
• Ga As
• In P
• Quartz
• Glass

Oxygen Plasma

• Contaminant removal
• Clean surfaces

Annealing and doping

• Zinc diffusion
• Annealing is available for Silicon
• Annealing for toxic material must be done under enclosed system

E-Beam Photoresist

• PMMA
• SU-8

Maskmaking

• Contact mask design

Soft Lithography

• Microfluidic
• Optofluidic